VC-C/D high rigidity anti vibration platform

VC-C/D high rigidity anti vibration platform Overview -

Product Details
Machines with vibration and rigidity requirements, or machines that are extremely sensitive to displacement, can achieve effective seismic isolation by using cement bases.

The machine has strict vibration specifications and rigidity requirements, and adopts a high rigidity RC structure to achieve effective seismic isolation.

The process machinery equipment itself requires high vibration and rigidity, and adopts a high rigidity RC structure to achieve effective vibration isolation effect. The surface of the R structure is treated with epoxy resin approved by the cleanroom, and the smoothness meets the cleanroom standards, with a hardness of 700kg/in ² or above.

Application industry:

Applied to process machinery and equipment in areas such as PH and MET
VC-C/D high rigidity anti vibration platform Advantage +
Product Features:

This guideline is a good equipment specification standard for optical inspection equipment and optical flatbed printing equipment with a 1 µ m process

RC type cement structure

High stability and precision to ensure that the machine itself is not affected by any external interference

Vibration isolation and fully safe production environment

Accurate production processes ensure that you and your customers have no worries

Safe production to save more subsequent maintenance costs

Specially designed for high-precision EUV, high-precision, ultra-high strength concrete (11000-15000 psi) standar

Standard	Speed µm/s (µin/s)	Amplitude µm	Description
VC-C	12.5 (500)
VC-D

	Flatness	Dimensional tolerance	Epoxy thickness	Steel degree	Maximum displacement	Minimum resolution
VC-C	≤1.5mm/m²	≤±1mm	≥3mm	≥1.0E+08N/m	12.5 µm	1 µm
VC-D	≤1.5mm/m²	≤±1mm	≥3mm	≥1.0E+08N/m	5 µm	0.3 µm

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VC-C/D high rigidity anti vibration platform

VC-C/D high rigidity anti vibration platform Overview -

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